Tribromosilane
Tribromosilane is the chemical compound with the formula HBr3Si. At high temperatures, it decomposes to produce silicon, and is an alternative to purified trichlorosilane of ultrapure silicon in the semiconductor industry.
.mw-parser-output .ib-chembox{border-collapse:collapse;text-align:left}.mw-parser-output .ib-chembox td,.mw-parser-output .ib-chembox th{border:1px solid #a2a9b1;width:40%}.mw-parser-output .ib-chembox td+td{width:60%}@media screen{html.skin-theme-clientpref-night .mw-parser-output .ib-chembox figure:not(.skin-invert-image):not(.skin-invert):not(.bg-transparent){background:var(--background-color-inverted,#f8f9fa)}}@media screen and (prefers-color-scheme:dark){html.skin-theme-clientpref-os .mw-parser-output .ib-chembox figure:not(.skin-invert-image):not(.skin-invert):not(.bg-transparent){background:var(--background-color-inverted,#f8f9fa)}}
| Column 1 | Column 2 | Column 3 |
|---|---|---|
| IUPAC name | ||
| Tribromosilane | ||
| Other names | ||
| Silicobromoform; Tribromomonosilane | ||
| CAS Number | .mw-parser-output .plainlist ol,.mw-parser-output .plainlist ul{line-height:inherit;list-style:none;margin:0;padding:0}.mw-parser-output .plainlist ol li,.mw-parser-output .plainlist ul li{margin-bottom:0}7789-57-3 Y | |
| 3D model (JSmol) | Interactive image | |
| ChemSpider | 74222 | |
| ECHA InfoCard | 100.029.250 | |
| PubChem CID | 82244 | |
| UNII | H5DT3G5DA3 Y | |
| CompTox Dashboard (EPA) | DTXSID50160668 | |
| InChI | ||
| InChI=1S/Br3HSi/c1-4(2)3/h4H | ||
| SMILES | ||
| BrSiHBr | ||
| Chemical formula | Br3HSi | |
| Molar mass | 268.805 g·mol−1 | |
| Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). |
Infobox references | | |
Tribromosilane is the chemical compound with the formula HBr3Si. At high temperatures, it decomposes to produce silicon, and is an alternative to purified trichlorosilane of ultrapure silicon in the semiconductor industry.
The Schumacher Process of silicon deposition uses tribromosilane gas to produce polysilicon, but it has a number of cost and safety advantages over the Siemens Process to make polysilicon.
It may be prepared by heating crystalline silicon with gaseous hydrogen bromide at high temperature. It spontaneously combusts when exposed to air.
.mw-parser-output .reflist-columns-2{column-width:30em}.mw-parser-output .reflist-columns-3{column-width:25em}body.skin-vector-2022 .mw-parser-output .reflist-columns-2{column-width:27em}body.skin-vector-2022 .mw-parser-output .reflist-columns-3{column-width:22.5em}.mw-parser-output .references[data-mw-group=upper-alpha]{list-style-type:upper-alpha}.mw-parser-output .references[data-mw-group=upper-roman]{list-style-type:upper-roman}.mw-parser-output .references[data-mw-group=lower-alpha]{list-style-type:lower-alpha}.mw-parser-output .references[data-mw-group=lower-greek]{list-style-type:lower-greek}.mw-parser-output .references[data-mw-group=lower-roman]{list-style-type:lower-roman}.mw-parser-output div.reflist-liststyle-upper-alpha .references{list-style-type:upper-alpha}.mw-parser-output div.reflist-liststyle-upper-roman .references{list-style-type:upper-roman}.mw-parser-output div.reflist-liststyle-lower-alpha .references{list-style-type:lower-alpha}.mw-parser-output div.reflist-liststyle-lower-greek .references{list-style-type:lower-greek}.mw-parser-output div.reflist-liststyle-lower-roman .references{list-style-type:lower-roman}
.mw-parser-output .asbox{position:relative;overflow:hidden}.mw-parser-output .asbox table{background:transparent}.mw-parser-output .asbox p{margin:0}.mw-parser-output .asbox p+p{margin-top:0.25em}.mw-parser-output .asbox-body{font-style:italic}.mw-parser-output .asbox-note{font-size:smaller}.mw-parser-output .asbox .navbar{position:absolute;top:-0.75em;right:1em;display:none}.mw-parser-output :not(p):not(.asbox)+style+.asbox,.mw-parser-output :not(p):not(.asbox)+link+.asbox{margin-top:3em}