Microactuator
Type of microscopic servomechanism
title: "Microactuator" type: doc version: 1 created: 2026-02-28 author: "Wikipedia contributors" status: active scope: public tags: ["microtechnology", "actuators"] description: "Type of microscopic servomechanism" topic_path: "general/microtechnology" source: "https://en.wikipedia.org/wiki/Microactuator" license: "CC BY-SA 4.0" wikipedia_page_id: 0 wikipedia_revision_id: 0
::summary Type of microscopic servomechanism ::
A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:
- Large travel
- High precision
- Fast switching
- Low power consumption
- Power free force sustainability For microactuator, there are two in addition
- Microstructurability
- Integrability
Principle of microactuators
The basic principle can be described as the expression for mechanical work
W=\overrightarrow{F}\cdot \Delta \overrightarrow{r}
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.
Classes of microactuators
Sources:
References
References
- (1998). "Micro actuators and their applications". Microelectronics Journal.
- (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110).
- (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small.
- (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid". Sensors and Materials.
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