Microactuator

Type of microscopic servomechanism


title: "Microactuator" type: doc version: 1 created: 2026-02-28 author: "Wikipedia contributors" status: active scope: public tags: ["microtechnology", "actuators"] description: "Type of microscopic servomechanism" topic_path: "general/microtechnology" source: "https://en.wikipedia.org/wiki/Microactuator" license: "CC BY-SA 4.0" wikipedia_page_id: 0 wikipedia_revision_id: 0

::summary Type of microscopic servomechanism ::

A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met:

  • Large travel
  • High precision
  • Fast switching
  • Low power consumption
  • Power free force sustainability For microactuator, there are two in addition
  • Microstructurability
  • Integrability

Principle of microactuators

The basic principle can be described as the expression for mechanical work

W=\overrightarrow{F}\cdot \Delta \overrightarrow{r}

since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

Classes of microactuators

Sources:

References

References

  1. (1998). "Micro actuators and their applications". Microelectronics Journal.
  2. (1996). "Actuators and their mechanisms in microengineering". IEE Colloquium on Actuator Technology: Current Practice and New Developments (Digest No: 1996/110).
  3. (2023). "Microfluidic Approaches for Microactuators: From Fabrication, Actuation, to Functionalization". Small.
  4. (2005). "Study of Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid". Sensors and Materials.

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